Process SOPs

• Wet Etchants

• Photoresist Processing

Equipment SOPs

• Karl Suss MA6

• SCS photoresist spinner

• SCP Wet Sink

• Rapid Thermal Annealer

• Ambios XP2 Profilometer

• Carver AutoFour/15-P Hot Press

• Polytec Laser Doppler Vibrometer

• CO2 Supercritical Dryer

• Old Probe Station (MC System 8806)

• DC Probe Station (Cascade RF-1 w/ DC probes)

• RF Probe Station (Cascade RF-1 w/ RF probes)

• Microfluidic Probe Station (Cascade REL-4800)

• Vacuum Probe Station (Desert Cryogenics)

• Westbond 7600A-66 Wire Bonder

• PRX1000 UV Source

• UV Curing System

• UV/ozone system

• Nikon TE2000-S and TE2000-U Fluorescence Microscopes

• Thermal Evaporator