Process SOPs
Wet Etchants
Photoresist Processing
Equipment SOPs
Karl Suss MA6
SCS photoresist spinner
SCP Wet Sink
Rapid Thermal Annealer
Ambios XP2 Profilometer
Carver AutoFour/15-P Hot Press
Polytec Laser Doppler Vibrometer
CO2 Supercritical Dryer
Old Probe Station (MC System 8806)
DC Probe Station (Cascade RF-1 w/ DC probes)
RF Probe Station (Cascade RF-1 w/ RF probes)
Microfluidic Probe Station (Cascade REL-4800)
Vacuum Probe Station (Desert Cryogenics)
Westbond 7600A-66 Wire Bonder
PRX1000 UV Source
UV Curing System
UV/ozone system
Nikon TE2000-S and TE2000-U Fluorescence Microscopes
Thermal Evaporator